Nano-Micro Manufacturing

Bonjin received his B.S. in mechanical engineering from Purdue University at West Lafayette in 2008. He joined Prof. Ferreira’s group at University of Illinois at Urbana-Champaign in 2008 as a MS/PhD student. His research focuses on manufacturing multiple degree of freedom micro/nano positioning stages and developing control schemes of MEMS devices. Mr. Koo develops high-yield fabrication process of 1D/2D/3D MEMS positioning stages based on conventional photolithography on SOI(silicon on insulator) wafer. He is also interested in implementing closed-loop control of the fabricated MEMS stages to increase performance for the various applications.