Welcome to Professor Placid Ferreira’s Group

At Illinois, our research group is exploring and developing novel scalable and non-lithographic processes that exploit chemical, mechanical, and electronic phenomena for manufacturing at the micro- and nanoscale. Using a manufacturing perspective, our group addresses critical challenges in process development, tool design, metrology and heterogeneous integration. Over the years, we have explored applications of our unique technologies to build MEMS & NEMS devices such as plasmonic nanoantenas, nanopositioning and manipulator systems, energy conversion and storage systems, optical elements, and much more!

Our key processes are:

When combined, these processes can deliver unique manufacturing cababilities and we pursue the development of new devices in collaboration with other research groups.